項(xiàng)目

技術(shù)指標(biāo)

EW-I

EW-Ⅱ

EW-Ⅲ

EW-IV

電阻率(25℃)/MQ ·cm

≥18

(5%時(shí)間不低于17)

≥15

(5%時(shí)間不低于13)

≥12.0

≥0.5

全硅/(μg/L)

≤2

≤10

≤50

≤1000

微粒數(shù)/

(個(gè)/L)

0.05μm~0.1μm

500

-

-

-

0.1μm~0.2μm

300

-

-

-

0.2μm~0.3μm

50

-

-

-

0.3μm~0.5μm

20

-

-

-

>0.5μm

4

-

-

-

細(xì)菌個(gè)數(shù)/(個(gè)/mL)

≤0.01

≤0.1

≤10

≤100

銅/(μg/L)

≤0.2

≤1

≤2

≤500

鋅/(μg/L)

≤0.2

≤1

≤5

≤500

鎳/(μg/L)

≤0.1

≤1

≤2

≤500

鈉/(μg/L)

≤0.5

≤2

≤5

≤1000

鉀/(μg/L)

≤0.5

≤2

≤5

≤500

鐵/(μg/L)

≤0.1

-

-

-

鉛/(μg/L)

≤0.1

-

-

-

氟/(μg/L)

≤1

-

氯/(μg/L)

≤1

≤1

≤10

≤1000

亞硝酸根/(μg/L)

≤1

-

-

-

溴/(μg/L)

≤1

-

-

-

硝酸根/(μg/L)

≤1

≤1

≤5

≤500

磷酸根/(μg/L)

≤1

≤1

≤5

≤500

硫酸根/(μg/L)

≤1

≤1

≤5

≤500

總有機(jī)碳/(μg/L)

≤20

≤100

≤200